Constructed from new PFA (PerFluoroAlkoxy resin), the LQ3 series offers excellent chemical and heat resistance.With the use of a triple seal construction the series provides a high quality sealing performance even under thermal loading .

The highest levels of cleanliness are maintained as the series is manufactured and packaged within a clean room environment. Available in a wide range of body types from and in both metric (Ø3 - Ø25) and imperial (1/8" - 1") tubing sizes.

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• 200°C Compatible 
• Triple Seal Construction
• Excellent Heat Resistance
• Easy to Assemble

The LLB clean air module with it's space saving design and modular construction allows reduced piping man hours, thus reducing operating costs.  With up to 24 variations, available options include a digital flow switch, regulator, on/off valve, restrictor and filter.

All fluid contact space is both grease and silicon-free and nominal filtration is 0.01 microns.
The highest standards of manufacturing are maintained through clean room assembly and double packing. Standard and high flow capacity specifications are available.

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• Nominal Filtration: 0.01 microns
• Fluid Contact Area: Grease-free and silicon free
• 24 Piping Variations
• RoHs Compliant

SMC's HRW Water-cooled Thermo-chiller provides highly accurate temperature control over a wide set temperature range (20 to 90°C). Without the use of a compressor, the HRW offers reduced power consumption through direct heat exchange between the circulating fluid and facility water.

Electricial component parts are accessible from the front panel and the vertical pump design means that maintenance can be carried out without disconnecting piping and discharging the circulating fluid. Both Devicenet and Analog Communication are available as further options.

• Energy Saving
• High Performance
• SEMATECH,SEMI Compliant
• CE marked and UL approved

This compact (10mm width) and light-weight (109g) Vacuum ejector allows the incorporation of a Vacuum generator,vacuum filter, supply and release valves and digital pressure switch in the one unit. The ZQ’s design means that it can be used as a stand alone ejector or can be incorporated in to a vacuum pump system. Available in three Nozzle diameters (0.5, 0.7, 1.0mm)

 
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• Compact and Light Weight
• Suction Filter: 30 µm
• Digital Vacuum Pressure Switch with LED display
• Switch and Analog Sensor Outputs